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SHENZHEN TEPCO ELECTRONIC EQUIPEMENT CO., LTD.

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FIREBIRD Automatic Thermo-compression Bonding System

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FIREBIRD Automatic Thermo-compression Bonding System

  • Classification:Semiconductor

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FIREBIRD Series

Automatic Thermo-compression Bonding System

Features

  • Flexible materials handling capability for Heterogeneous Integration in 2D, 2.5D and 3D format

    • Co-exist die input from both wafer and tape & reel

    • Field configurable for strip / singulated / wafer substrate

    • Ultra wide carrier handling for singulated substrate

    • Direct wafer and glass substrate handling with SlimFEM

  • Reliable with solid installation bases

    • > 250 sets installation in mass production

  • Innovative process

    • Inert environment enables Liquid Phase Contact (LPC) process for high productivity

    • Real-time active tip tilt



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Tag:Thermo-compressionBonding,ASMPT,TCB

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